JPH0399765U - - Google Patents
Info
- Publication number
- JPH0399765U JPH0399765U JP839390U JP839390U JPH0399765U JP H0399765 U JPH0399765 U JP H0399765U JP 839390 U JP839390 U JP 839390U JP 839390 U JP839390 U JP 839390U JP H0399765 U JPH0399765 U JP H0399765U
- Authority
- JP
- Japan
- Prior art keywords
- film
- substrate
- metal material
- evaporation source
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001704 evaporation Methods 0.000 claims description 6
- 230000008020 evaporation Effects 0.000 claims description 6
- 238000007738 vacuum evaporation Methods 0.000 claims description 5
- 239000007769 metal material Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 239000000919 ceramic Substances 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims 2
- 230000002093 peripheral effect Effects 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP839390U JPH0399765U (en]) | 1990-01-31 | 1990-01-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP839390U JPH0399765U (en]) | 1990-01-31 | 1990-01-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0399765U true JPH0399765U (en]) | 1991-10-18 |
Family
ID=31512024
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP839390U Pending JPH0399765U (en]) | 1990-01-31 | 1990-01-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0399765U (en]) |
-
1990
- 1990-01-31 JP JP839390U patent/JPH0399765U/ja active Pending